Сотрудник подразделения

Альберт Матвеевич Скворцов

профессор, доктор технических наук

Публикации

  1. 3Polyakov D.S., Skvortsov A.M., Veiko V.P. Influence of Pulsed Fiber Laser Radiation on Surface Morphology and Electrical Properties of Si/SiO2 Structure // Journal of Laser Micro Nanoengineering - 2015, Vol. 10, No. 3, pp. 269-273 [IF: 0.759, SJR: 0.431]
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  2. 2Veiko V.P., Skvortsov A.M., Huynh C.T., Petrov A.A. Laser ablation of single-crystalline silicon by radiation of pulsed frequency-selective fiber laser // Technical Physics Letters - 2015, Vol. 41, No. 7, pp. 701-704 [IF: 0.702, SJR: 0.443]
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  3. 1Skvortsov A.M., Veiko V.P., Huynh C.T., Khaletskiy R.A. Microstructuring system SiO2/Si with nanosecond pulsed fiber laser // Proceedings of SPIE - 2013, Vol. 9065, pp. 90650-1–9065-5 [SJR: 0.216]
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